Satoshi Yamazaki, Yojiro Oba, Hirokazu Sasaki, Masato Ohnuma
Abstract
The small angle X-ray scattering (SAXS) ac米兰中文官方网站 ultra-small angle X-ray scattering (USAXS) measurements were performed for the quantitative evaluation of the nano inclusions ac米兰中文官方网站 voids in electrodeposited copper foil. It is presumed that these nano inclusions are the substances added when manufacturing the foil, and that the voids were formed by the aggregation ac米兰中文官方网站 disappearance of the nano inclusions at annealing. As a result of the measurements, it was confirmed that there is a clear difference in the scattering intensity between the foil to which an organic additive had been added ac米兰中文官方网站 one without an additive in the High-qregion where theqis larger than about 0.3 nm-1. ac米兰中文官方网站 foil annealed at 300°C, the scattering intensity increased ac米兰中文官方网站 Low-qregion. These scattering intensities are presumed to be originated from the nano inclusions and voids, respectively.
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